brooks mass flow controller

DeviceNet: 1 x M12 with threaded coupling nut (B). Read about the advantages of state-of-the-art network protocols. For further information, please see our Privacy Policy. Sign-up for our newsletter to be informed of product updates, news and events. Quickly find products and documentation by name or model number. This enables you to improve overall equipment effectiveness and flexibility by planning better for service times and reducing unproductive downtime. CE: EMC Directive 2014/30/EU Product Quick Find and reduces inventory, User-accessible service port simplifies installation, To learn more, please read our e-book or visit our website for more resources. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates. Controls and monitors up to 30 devices, powers up to 10 devices. Brooks Instrument is more than a flow meter manufacturer. Please refer to our Privacy Policy for details on how DirectIndustry processes your personal data. With the Quantim series, Brooks has taken the lead in driving improvements in Coriolis flow technology: Our patented Quantim Coriolis sensor design measures low flows independent of fluid type or process variables. processes require. One device. For further information, please see our Privacy Policy. We use cookies to improve your browsing experience. Multi-protocol communication options include DeviceNet, MultiFlo technology enables new gas calibrations and full-scale ranges without removing the MFC from the gas line, maximizing process uptime, MultiFlo programming is simple and user-friendly; new gas can be selected in under 60 seconds, OEMs and large end users can greatly reduce the number of gas and range-specific controllers they inventory, Excellent process gas accuracy backed by superior metrology systems and calibration based on global standards, Corrosion-resistant sensor provides unmatched long-term stability ensuring maximum yield and throughput, User-accessible service port simplifies troubleshooting and diagnostic tasks, Variety of elastomer seals provide cost performance flexibility across range of applications, Multi-protocol communication interface supports integration into existing systems, Solar cell chemical vapor deposition systems, Excellent option for manifold/gas delivery systems. {{/end}} internal finish (optional), Enhanced process (5 Ra avg.) The DLLs are to be used when creating your own application in LabVIEW. We use cookies to improve your browsing experience. If you need assistance or cant find what youre looking for, please contact Applications Engineering or your local Brooks Instrument representative. Enables users to set-up communication with Brooks digital mass flow controllers, pressure controllers and secondary electronics. Product Quick Find By continuing to use our site, you agree to our use of cookies. By continuing to use our site, you agree to our use of cookies. Process pressure: 100, 310, 70 barProcess temperature: -14 C - 65 CVolumetric flow rate: 0 l/min - 2,500 l/min. SLA Series Mass Flow Controllers with PROFINET, Life Sciences: Biotech, Pharma & Medical Devices, Thin Films, Coatings, and Surface Treatments, Choose from a broad array of advanced alarms and diagnostic functions, An embedded Web-based interface enables easy set up and configuration, Real-time diagnostics information supports predictive maintenance. response for time-critical flow processes. If you need assistance or cant find what youre looking for, please contact Applications Engineering or your local Brooks Instrument representative. Product Quick Find Thermal Mass Flow Controllers & Meters Component datasource missing. Achieve superior accuracy and unmatched zero stability in ultra-low-flow gas and liquid measurement and control with the Quantim Coriolis mass flow controllers and meters from Brooks Instrument. Find a model number or product name, Accessories & Software Cables, Filters, Valves, Secondary Electronics, Software, Semiconductor Products Please contact us: 407 West Vine StreetHatfield, PA19440-0903 USA. For further information, please see our Privacy Policy. By continuing to use our site, you agree to our use of cookies. Talk to one of our application engineering experts by calling: 1-888-554-3569, Closes valve when set point drops below 1.5% full scale. We use cookies to improve your browsing experience. Ultra-high purity products for the semiconductor industry. By continuing to use our site, you agree to our use of cookies. Select a datasource for this component. Available in two options packages, the SLA Series Biotech mass flow controller offers valuable bioprocessing features, such as a high turndown ratio to control a wider range of gas flows, an extremely low leak rate valve, materials of construction safe for use in FDA-regulated processes and advanced diagnostics. Find a model number or product name, Accessories & Software Cables, Filters, Valves, Secondary Electronics, Software, Semiconductor Products 407 West Vine StreetHatfield, PA19440-0903 USA. ferritic stainless steel, Valve Seat: 316L, Viton fluoroelastomers, Buna-N, Kalrez or Teflon, Control Valve Output, Network Interruption, Enhanced process (5 Ra avg.) Process pressure: 7 psi - 90 psiProcess temperature: 0 C - 50 CVolumetric flow rate: 0 l/min - 300 l/min. easily switch between different gases and ranges on a single device, Find a model number or product name, Accessories & Software Cables, Filters, Valves, Secondary Electronics, Software, Semiconductor Products A comprehensive gas database enabling you to configure your MultiFlo capable MFC for thousands of gas types and ranges without removing it from the gas line. Use the following guide (model code information from data sheet) to translate the CAD configurations available below. By continuing to use our site, you agree to our use of cookies. Brooks Instrument has been innovating thermal mass flow technology for decades. Sign-up for our newsletter to be informed of product updates, news and events. Sign-up for our newsletter to be informed of product updates, news and events. Predictive maintenance and process quality are enhanced by having a broad array of thresholds and alarms that can be set and monitored in real-time by these intelligent Brooks Instrument MFCs. Setup your SLA Series mass flow controllers with PROFINET to read multiple variables simultaneously such as flow, totalized flow, temperature, valve drive and more via the web-based interface. Controls and monitors up to 30 devices, powers up to 10 devices. In addition, the embedded web-based interface helps you set up calibration intervals and track firmware updates as well as instrument exchanges. Ultra-high purity products for the semiconductor industry. We can help identify the best digital communications protocol and configure our digital MFCs to fully satisfy your system requirements. By continuing to use our site, you agree to our use of cookies. SLA5800 has been proven to maximize production uptime and reduce maintenance and machine downtime costs. Product Quick Find Maximum flexibility. A Windows based application providing expanded control of Brooks Instrument MFCs and Pressure Controllers. The faster your thermal mass flow controllers and meters respond, the more efficient and productive your processes can be. A Windows based application providing expanded control of Brooks Instrument MFCs and Pressure Controllers. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Sign-up for our newsletter to be informed of product updates, news and events. , stable, repeatable and reproducible mass flow measurement and control, even under changing conditions. Talk to one of our application engineering experts by calling: 1-888-554-3569, Easy to Change Range and Recalibrate in the Field, 1% full scale including linearity at calibrated conditions, E Series: < 3 seconds within 2% of full scale (0-100% command step), I Series: 6 seconds within 2% of full scale (0-100% command step), I Series: 6 seconds within 2% of full scale (0-98% command step), 407 West Vine StreetHatfield, PA19440-0903 USA. One device. {{#pushedProductsPlacement4.length}} NEW! High purity flow path. {{#i!=(product.specData.length-1)}} Talk to one of our application engineering experts by calling: 1-888-554-3569, Standard Flow Accuracy (below) or [(zero stability/flow rate) x 100]% of rate, whichever is greater, Elastomer: Outboard 1 x 10-9 atm. Ultra-high purity products for the semiconductor industry. Ultra-high purity products for the semiconductor industry. Sign-up for our newsletter to be informed of product updates, news and events. {{#each pushedProductsPlacement4}}, {{#pushedProductsPlacement5.length}} Actively in use for decades in thousands of applications worldwide, they utilize a unique, extremely stable flow sensor to provide the reliable, accurate and repeatable measurement and control that todays demanding industrial manufacturing processes require. A Windows based application providing expanded control of Brooks Instrument MFCs and Pressure Controllers. Raises the standard in performance for value-driven metal sealed applications. Find a model number or product name, Accessories & Software Cables, Filters, Valves, Secondary Electronics, Software, Semiconductor Products Sign-up for our newsletter to be informed of product updates, news and events. SLAMf Series Elastomer Sealed Thermal Mass Flow Controllers & Meters 407 West Vine StreetHatfield, PA19440-0903 USA. By continuing to use our site, you agree to our use of cookies. If you need assistance or cant find what youre looking for, please contact Applications Engineering or your local Brooks Instrument representative. Find a model number or product name, Accessories & Software Cables, Filters, Valves, Secondary Electronics, Software, Semiconductor Products Life Sciences: Biotech, Pharma & Medical Devices, Thin Films, Coatings, and Surface Treatments, Long-term zero stability of <0.2% full scale per year, <3 seconds settling time to command changes with negligible overshoot/undershoot, Wide flow range from 3 sccm up to 30,000 slpm, Optional enhanced process internal finish - 5 inch Ra avg, Mechanically and electrically compatible with other mass flow controllers, TTL compatible "valve off" and purge function, All-metal flow path enhances gas purity and reduces leaks, Proven long-term stability and accuracy across broad process and application range, Excellent return on investment due to reliable performance, Removable flow sensor eliminates need for continuous monitoring and readjustment of gas pressures, Easily installed and serviced with analog only input/outputs. Downport ANSI/ISA 76.00.02 (See Model Code). Life Sciences: Biotech, Pharma & Medical Devices, Thin Films, Coatings, and Surface Treatments. By continuing to use our site, you agree to our use of cookies. The MFC can then communicate that information at ultra-fast speeds to the PLC or DCS or other devices on the network for further action in real-time. Talk to one of our application engineering experts by calling: 1-888-554-3569, 17025 Certified Devices (Includes linearity, excludes calibration system measurement uncertainty, per SEMI E69), Standard Devices (includes uncertainty from reference standards, Optional 4500 psi/310 bar on 50 slpm max device, <0.2% F.S. By continuing to use our site, you agree to our use of cookies. Explore high-performance instruments, from mass flow controllers to rotameters, supported by expertise and service only found at Brooks Instrument. FDA/USP-certified O-rings and valve seat materials, Certified premium materials used in MFC wetted gas flow path, Reduces the number of MFC configurations by 90%. Process pressure: 0 bar - 10 barProcess temperature: 5 C - 50 CVolumetric flow rate: 40 l/min. 0.9% of SP (20-100% FS), 0.18% of FS (<20%FS), Ensures device operates within user-specified limits for high processuptime, DeviceNet, EtherCAT, EtherNet/IP, Profibus, PROFINET, RS-485, 250:1 FS flow rates 5 sccm -150 slpm; 150:1 all other FS flowrates, Valve: <0.005 sccm for less than 150 slpm; <15.6 sccm for more than 150slpm, Air, CO2, N2, O2 gas pages can be changed in situ to reduce number and type spare MFCsstocked, DA/USP Class VI and ADI-free O-rings and valveseats, Wetted path materials of construction 2.1 material cert; NIST/ICC calibrationtraceability, Get complete details on the SLA5800 Series Thermal Mass Flow Controllers & Meters, Discover the advantages of the SLAMf Series MFCs specially designed for harsh environments. Process pressure: 0 bar - 34.47 barProcess temperature: 0 C - 50 CVolumetric flow rate: 0 l/min - 300 l/min. Fast delivery of select variable area flow meters. The industry standard for low-flow Coriolis measurement and control. Outstanding performance, reliability, and repeatability. All while delivering the exact same, ultra-precise and repeatable output on the other side. Use the following guide (model code information from data sheet) to translate the CAD configurations available below. Its metal sealed construction and electro-polished wetted surfaces ensure outstanding flow integrity and help improve overall process efficiency by eliminating the need for continuous monitoring and readjustment of gas pressures to provide a stable gas flow. Models 5850E, i / 5851E, i / 5860E, i / 5861E, i / 5853E, i / 5863E, i, Life Sciences: Biotech, Pharma & Medical Devices, Thin Films, Coatings, and Surface Treatments, Installation & Operation Manual - 5853, 5863, Long-term zero stability of <0.2% full scale per year, Fast flow response to command changes with negligible overshoot/undershoot, Wide range of flow ratings - from 3 sccm up to 1000 slpm, Mechanically and electrically compatible with other mass flow controllers, Proven long-term stability and accuracy across broad process and application range, Excellent return on investment due to reliable performance, Removable flow sensor eliminates need for continuous monitoring and readjustment of gas pressures, Easily installed and serviced due to analog only input/outputs, Chemical and petrochemical catalyst research and pilot processes. Mechanical Connection Use the following guide (model code information from data sheet) to translate the CAD configurations available below. We use cookies to improve your browsing experience. maximum deviation from specified accuracy after re-zeroing, DeviceNet: 1xM12 with threaded coupling nut (B), EtherCAT, EtherNet/IP: 1x5-pin M8 with threaded coupling nut/2xRJ45, Profibus: 1x15-pin Male Sub-D/1x9-pin female Sub-D, Without Valve: 4 Watts (DeviceNet), 3 Watts (EtherNet/IP), ISO/IEC 17025:2005 Large installed base with proven long term performance, Life Sciences: Biotech, Pharma & Medical Devices, Thin Films, Coatings, and Surface Treatments, C - Inline Filter, Cartridge Filter, 20 Micron, 100% of fluid flows through low-mass sensor tube (no bypass), The Quantim Coriolis series' proprietary optical sensing technique enables accuracy at extreme low flows, Measures both liquids and gases over a wide flow range, Coplanar valve delivers super-fast response times, The Quantim Coriolis series' offers the smallest, lowest-flow Coriolis meter and controller available on the market, Measures and outputs two of four parameters: mass flow, volumetric flow, temperature, density, Independent diagnostic/service port and user display, Variety of material options, enclosure types and area classifications available, Advanced sensor and tube technology enable accuracy at extreme low flows, Process chemistry and/or process conditions can be altered without the need to change or recalibrate the measurement system, Multivariable outputs improve and simplify process monitoring and diagnostics, increasing yields and reducing cost of ownership, Integrated sensor, valve and PID control in one package simplifies purchase, installation and startup, Reaches set point in <2 seconds reducing wasted material, Compact size enables easy integration into intricate process systems, The Quantim Coriolis series' has no internal moving parts, which minimizes maintenance. Maximum flexibility. 316 Stainless Steel, Hastelloy C-22, 1707 PH,43055, CE: EN61326: 2006 (FCC Part 15 & Canada IC-subset of CE testing), Status Lights: MFC Health, Network Status, Alarms: Sensor Output, Control Valve Output, Over Temperature, Power Surge/Sag, Network Interruption, Diagnostic/Service Port: RS485 via 2.5 mm jack. Find a model number or product name, Accessories & Software Cables, Filters, Valves, Secondary Electronics, Software, Semiconductor Products Find a model number or product name, Accessories & Software Cables, Filters, Valves, Secondary Electronics, Software, Semiconductor Products Product Quick Find Product Quick Find {{name}}: {{value}} Sign-up for our newsletter to be informed of product updates, news and events. internal surface finish(optional), 407 West Vine StreetHatfield, PA19440-0903 USA. We use cookies to improve your browsing experience. We use cookies to improve your browsing experience. Class I, Zone 2, IIC T4 Ultra-high purity products for the semiconductor industry, Elastomer Sealed Thermal Mass Flow Controllers, Replacement Products: SLA5800 or 4800 Series, Metal Sealed Thermal Mass Flow Controllers, 407 West Vine StreetHatfield, PA19440-0903 USA. Cost-effective gas flow metering for targeted applications. Every product line has a workhorse our 5850E and 5850i Series thermal mass flow controllers fit the bill. We use cookies to improve your browsing experience. 5850EM Series metal sealed mass flow controllers measure and control high-pressure gas flows in ultra-clean environments with a proven stability built on the performance of the widely used 5850E & i Series MFCs. Now, the industry-leading SLA5800 & SLAMf mass flow controllers (MFCs) from Brooks Instrument are available with PROFINET. Class I, Div 2, Group A, B, C, D As the leading supplier of flow technology, we offer the worlds most comprehensive line of precision flow control and flow measurement devices. Sign-up for our newsletter to be informed of product updates, news and events. Our applications engineers are ready to help solve your measurement and control challenges. For further information, please see our Privacy Policy. Choose the option that best fits your bioreactor and bioprocessing requirements. {{#each product.specData:i}} multi-variable, pressure transient insensitive (PTI), metal sealed mass flow controllers and meters. Product Quick Find Process pressure: 0 psi - 1,500 psiProcess temperature: 0 C - 65 CVolumetric flow rate: 0 l/min - 30,000 l/min. Thats the advanced simplicity you get with the SLA5800 Series digital mass flow controllers and meters. 407 West Vine StreetHatfield, PA19440-0903 USA. The result: unsurpassed performance - the most accurate, stable, repeatable and reproducible mass flow measurement and control, even under changing conditions. We use cookies to improve your browsing experience. Life Sciences: Biotech, Pharma & Medical Devices, Thin Films, Coatings, and Surface Treatments. For further information, please see our Privacy Policy. {{/each}}, Process pressure: 0 bar - 10 barProcess temperature: 5 C - 50 CPrecision: 1, 0.35 %. It enables a new level of process flexibility combined with unprecedented flow measurement and control performance. For further information, please see our Privacy Policy. (Body size 0 & 1 only). Proven long-term stability. operation, Durable, robust metal top lid prevents damage during installation, Traceable calibrations to meet industry standards and regulatory requirements, Chemical and petrochemical catalyst research and pilot processes. Find a model number or product name, Accessories & Software Cables, Filters, Valves, Secondary Electronics, Software, Semiconductor Products Process pressure: 0 psi - 1,500 psiProcess temperature: 0 C - 65 CVolumetric flow rate: 0 l/min - 1,000 l/min. Later on, diagnostics and troubleshooting are easily accessible - a laptop and browser are all you need. The DLLs are to be used when creating your own application in LabVIEW. Hardened for the harshest environments. This data may provide insight for device or machine-health and be useful for troubleshooting. For further information, please see our Privacy Policy. Multiple gases in one device equals maximum process flexibility and productivity. Ultra-high purity products for the semiconductor industry, Ensures Consistent Flow During Initial Recipe Step. -, {{product.productPrice.formattedPriceMax}}, KEM Kppers Elektromechanik GmbH mass flow meters. For further information, please see our Privacy Policy. 407 West Vine StreetHatfield, PA19440-0903 USA. Product Quick Find Ultra-high purity products for the semiconductor industry. P5 - Profibus / Analog (Input 0-5 V; Output 0-5 V); 9-Pin Female D conn. / 15-Pin Male D conn. P0 - Profibus / Analog (Input 0-20 mA; Output 0-20 mA); 9-Pin Female D conn. / 15-Pin Male D conn. P4 - Profibus / Analog (Input 4-20 mA; Output 4-20 mA); 9-Pin Female D conn. / 15-Pin Male D conn. E5 - EtherCAT / (Output 0-5 V); 2xRJ45 signal 2-Pin power, D5 - DeviceNet / Analog (Output 0-5 V); 5-Pin mico signal and power / 3-Pin analog signal, S5 - RS485: (S-Protocol)/Analog (Input 0-5 V; Output 0-5 V)15-Pin Male D (Brooks Protocol), S1 - RS485: (S-Protocol)/Analog (Input 0-10 V; Output 0-10 V); 15-Pin Male D (Brooks Protocol), S0 - RS485 (S-Protocol)/Analog (Input 0-20 mA ; Output 0-20 mA); 15-Pin Male D (Brooks Protocol), S4 - RS485 (S-Protocol)/Analog (Input 4-20 mA; Output 4-20 mA); 15-Pin Male D (Brooks Protocol), L5 - RS485 (L-Protocol)/Analog (Input 0-5 V; Output 0-5 V); 15-Pin Male D (Celerity/Legacy Protocol), L1 - RS485 (L-Protocol)/Analog (Input 0-10 V; Output 0-10 V); 15-Pin Male D (Celerity/Legacy Protocol), Programmable multi-gas/multi-range capabilities, Brooks MultiFlo gas database contains thousands of native gas runs to establish correction functions, Sub-1 second flow response time and accuracy of 1% set point for demanding applications, Easily accessible diagnostic service port is independent of tool communication.

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